References

[1] R. Jaeger, Introduction to Microelectronic Fabrication, Reading, MA: Addison-Wesley, 1993.

[2] W. Runyan and K. Bean, Semiconductor Integrated Circuit Processing Technology, Reading, MA: Addison-Wesley, 1990.

[3] S. Sze, VLSI Technology, New York, NY: McGraw-Hill, 1983.